MS13X 多晶硅产品中碳含量分析填充柱

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多晶硅产品中碳含量分析填充柱
多晶硅产品中碳含量分析填充柱 详细信息：

名称：填充柱
规格：40cm*2mm（内径）
型号：13X，60-80目

名称：甲烷转化柱
规格：25cm*3mm（内径）0.2mm的镍催化剂
应用：多晶硅用回收氢气中氯化氢、氮气、氧气、总碳含量的测定-气相色谱法.


随着科技的进步,对硅器件的品质提出更高的要求,但由于碳杂质的存在,严重制约着其稳定性和使用寿命的提高.文章对多晶硅碳含量和回收氢气中甲烷含量,三氯氢硅中甲基二氯硅烷等相关性进行分析,结果表明:多晶硅碳含量主要受氢气中甲烷含量影响,而三氯氢硅中甲基二氯硅烷对多晶硅碳含量影响不大,实际生产中应将回收氢中甲烷含量控制在5ppmv以下.

浩瀚色谱采用MS13X填充柱测定总碳含量，外标法定量，结果满意。


多晶硅产品中碳含量分析填充柱   测试谱图：




Packed column for analysis of carbon content in polysilicon products
Packed column for analysis of carbon content in polysilicon products Details:

Name: Packed column
Specification: 40cm*2mm (inner diameter)
Model: 13X, 60-80 mesh

Name: Methane Conversion Column
Specification: 25cm*3mm (inner diameter) 0.2mm nickel catalyst
Application: Determination of Hydrogen Chloride, Nitrogen, Oxygen, and Total Carbon in Reclaimed Hydrogen for Polycrystalline Silicon-Gas Chromatography.


With the advancement of science and technology, higher requirements are put forward for the quality of silicon devices, but due to the presence of carbon impurities, the stability and service life of the The correlation analysis of methyldichlorosilane in hydrogen silicon and other correlations showed that the content of polysilicon carbon is mainly affected by the content of methane in hydrogen, while methyldichlorosilane in trichlorosilane has little effect on the content of polysilicon carbon. The methane content in the recovered hydrogen should be controlled below 5ppmv.

Haohan Chromatography uses MS13X packed column to determine the total carbon content. The external standard method is used to quantify the total carbon content and the results are satisfactory.


Packed column for analysis of carbon content in polysilicon products Test spectrum: